Inventor

STONE DALE

US3 patents

⚠️ This page may combine multiple inventors who share the name “STONE DALE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

2 patents

US7751172B2Jul 6, 2010

Sliding wafer release gripper/wafer peeling gripper

AXCELIS TECH INC11 citations76

US7381969B2Jun 3, 2008

Load lock control

AXCELIS TECH INC6 citations56

BLAKE JULIAN

1 patent

US8598021B2Dec 3, 2013

Method for junction avoidance on edge of workpieces

BLAKE JULIAN2 citations54