Inventor

STEVENOT SCOTT

US5 patents

⚠️ This page may combine multiple inventors who share the name “STEVENOT SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents

US8043430B2Oct 25, 2011

Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber

LAM RES CORP12 citations82

US10090211B2Oct 2, 2018

DHINDSA RAJINDER

1 patent

US8784948B2Jul 22, 2014

Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber

DHINDSA RAJINDER1 citations50

STEVENOT SCOTT

LAM RES CORP

Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber

Edge seal for lower electrode assembly

Substrate connector including a spring pin assembly for electrostatic chucks

Edge seal configurations for a lower electrode assembly

DHINDSA RAJINDER

Methods and apparatuses for controlling gas flow conductance in a capacitively-coupled plasma processing chamber