Inventor
WU TSUNG-CHENG
TW5 patents
Patents
5 patentsUS12437975B2Oct 7, 2025
Apparatus and method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12071699B2Aug 27, 2024
Apparatus for electro-chemical plating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11935728B2Mar 19, 2024
Apparatus and method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11427924B1Aug 30, 2022
Apparatus for electro-chemical plating
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11569071B2Jan 31, 2023
Cover ring and ground shield for physical vapor deposition chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57