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Inventor
SOUMA TAKASHI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “SOUMA TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RIKAGAKU KENKYUSHO
1 patent
US4117340A
Sep 26, 1978
Electron beam exposure system
RIKAGAKU KENKYUSHO
16 citations
79
JEOL LTD
1 patent
US4151422A
Apr 24, 1979
Electron beam exposure method
JEOL LTD
24 citations
77