Inventor
HUANG JACKY
TW6 patents
Patents
6 patentsUS7580129B2Aug 25, 2009
Method and system for improving accuracy of critical dimension metrology
TAIWAN SEMICONDUCTOR MFG8 citations83
US7732109B2Jun 8, 2010
Method and system for improving critical dimension uniformity
TAIWAN SEMICONDUCTOR MFG6 citations73
US7787685B2Aug 31, 2010
Extracting ordinary and extraordinary optical characteristics for critical dimension measurement of anisotropic materials
TAIWAN SEMICONDUCTOR MFG2 citations55
US8027529B2Sep 27, 2011
System for improving critical dimension uniformity
TAIWAN SEMICONDUCTOR MFG1 citations51
US7349086B2Mar 25, 2008
Systems and methods for optical measurement
TAIWAN SEMICONDUCTOR MFG1 citations51
US7777884B2Aug 17, 2010
Method and system for optimizing sub-nanometer critical dimension using pitch offset
TAIWAN SEMICONDUCTOR MFG0 citations50