Inventor

STEIGERWALD MICHAEL D G

DE3 patents

Patents

3 patents

US7425701B2Sep 16, 2008

Electron-beam device and detector system

ZEISS CARL NTS GMBH20 citations90

US7910887B2Mar 22, 2011

Electron-beam device and detector system

ZEISS CARL NTS GMBH4 citations71

US7507962B2Mar 24, 2009

Electron-beam device and detector system

ZEISS CARL NTS GMBH4 citations60