Inventor
HUBER MARKUS B
US5 patents
⚠️ This page may combine multiple inventors who share the name “HUBER MARKUS B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS9726617B2Aug 8, 2017
Apparatus and methods for finding a best aperture and mode to enhance defect detection
KLA TENCOR CORP20 citations91
US10132760B2Nov 20, 2018
Apparatus and methods for finding a best aperture and mode to enhance defect detection
KLA TENCOR CORP1 citations51
US9816940B2Nov 14, 2017
Wafer inspection with focus volumetric method
KLA TENCOR CORP1 citations46