Inventor
CHEN GUANGQING
US11 patents
⚠️ This page may combine multiple inventors who share the name “CHEN GUANGQING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS9355200B2May 31, 2016
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV16 citations90
US9804504B2Oct 31, 2017
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV13 citations82
US11221560B2Jan 11, 2022
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV4 citations73
US9494874B2Nov 15, 2016
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV5 citations70
US10007744B2Jun 26, 2018
Process based metrology target design
ASML NETHERLANDS BV2 citations68
US10296692B2May 21, 2019
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV2 citations64
US12510829B2Dec 30, 2025
Method and apparatus for design of a metrology target
ASML NETHERLANDS BV0 citations62
US12204826B2Jan 21, 2025
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV0 citations59
US11580274B2Feb 14, 2023
Method and apparatus for inspection and metrology
ASML NETHERLANDS BV1 citations59
US10296681B2May 21, 2019
Process based metrology target design
ASML NETHERLANDS BV1 citations58