Inventor
CHANG TAI-HON P
US11 patents
⚠️ This page may combine multiple inventors who share the name “CHANG TAI-HON P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS5122663AJun 16, 1992
Compact, integrated electron beam imaging system
IBM100 citations95
US4477729AOct 16, 1984
Continuously writing electron beam stitched pattern exposure system
IBM44 citations92
US4165395AAug 21, 1979
Process for forming a high aspect ratio structure by successive exposures with electron beam and actinic radiation
IBM42 citations92
US5155412AOct 13, 1992
Method for selectively scaling a field emission electron gun and device formed thereby
IBM44 citations90
US4621232ANov 4, 1986
Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure
IBM12 citations70
US4426583AJan 17, 1984
Electron beam potential switching apparatus
IBM12 citations67
ETEC SYSTEMS INC
3 patentsUS6023060AFeb 8, 2000
T-shaped electron-beam microcolumn as a general purpose scanning electron microscope
ETEC SYSTEMS INC58 citations95
US6288401B1Sep 11, 2001
Electrostatic alignment of a charged particle beam
ETEC SYSTEMS INC26 citations92
US6011269AJan 4, 2000
Shaped shadow projection for an electron beam column
ETEC SYSTEMS INC16 citations84