Inventor
XIONG RUITONG
US9 patents
Patents
9 patentsUS12125675B2Oct 22, 2024
RF pulsing assisted low-k film deposition with high mechanical strength
APPLIED MATERIALS INC2 citations72
US11621162B2Apr 4, 2023
Systems and methods for forming UV-cured low-κ dielectric films
APPLIED MATERIALS INC2 citations71
US11600486B2Mar 7, 2023
Systems and methods for depositing low-κdielectric films
APPLIED MATERIALS INC2 citations71
US12119223B2Oct 15, 2024
Single precursor low-k film deposition and UV cure for advanced technology node
APPLIED MATERIALS INC0 citations60
US11572622B2Feb 7, 2023
Systems and methods for cleaning low-k deposition chambers
APPLIED MATERIALS INC0 citations60
US12525447B2Jan 13, 2026
Systems and methods for depositing low-k dielectric films
APPLIED MATERIALS INC0 citations59
US11967498B2Apr 23, 2024
Systems and methods for depositing low-k dielectric films
APPLIED MATERIALS INC1 citations59
US12500080B2Dec 16, 2025
Systems and methods for depositing low-K dielectric films
APPLIED MATERIALS INC0 citations58
US11830728B2Nov 28, 2023
Methods for seamless gap filling of dielectric material
APPLIED MATERIALS INC0 citations50