Inventor
HIRAMOTO TATSUMI
JP14 patents
Patents
14 patentsUS4464336AAug 7, 1984
Method of sterilization
USHIO ELECTRIC INC105 citations95
US5510158AApr 23, 1996
Process for oxidation of an article
USHIO ELECTRIC INC75 citations94
US4482395ANov 13, 1984
Semiconductor annealing device
USHIO ELECTRIC INC48 citations92
US4468260AAug 28, 1984
Method for diffusing dopant atoms
USHIO ELECTRIC INC35 citations92
US5444331AAug 22, 1995
Dielectric barrier discharge lamp
USHIO ELECTRIC INC42 citations91
US5581152ADec 3, 1996
Dielectric barrier discharge lamp
USHIO ELECTRIC INC51 citations90
US4398094AAug 9, 1983
Equipment and method for annealing semiconductors
USHIO ELECTRIC INC25 citations81
US5481159AJan 2, 1996
Metal vapor discharge lamp
USHIO ELECTRIC INC17 citations73
US4578144AMar 25, 1986
Method for forming a single crystal silicon layer
USHIO ELECTRIC INC10 citations73
US4500565AFeb 19, 1985
Deposition process
USHIO ELECTRIC INC11 citations73
US3978361AAug 31, 1976
Light source device
USHIO ELECTRIC INC16 citations73
US6573658B1Jun 3, 2003
Mercury lamp of the short arc type and UV emission device
USHIO ELECTRIC INC4 citations62
US5589735ADec 31, 1996
Emission device with a cadmium lamp
USHIO ELECTRIC INC6 citations61
US4704346ANov 3, 1987
Process for the exposure of semiconductor wafer
USHIO ELECTRIC INC4 citations60