Inventor
TOMPKINS TERRY C
3 patents
Patents
3 patentsUS4397937AAug 9, 1983
Positive resist compositions
IBM38 citations91
US4601969AJul 22, 1986
High contrast, high resolution deep ultraviolet lithographic resist composition with diazo carbonyl compound having alpha phosphoryl substitution
IBM12 citations72
US4522911AJun 11, 1985
Deep ultra-violet lithographic resists with diazohomotetramic acid compounds
IBM16 citations72