Inventor
YAMASAKI SHIGERU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YAMASAKI SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS6122036ASep 19, 2000
Projection exposure apparatus and method
NIKON CORP624 citations98
US6272763B1Aug 14, 2001
Staging apparatus and method, and method for manufacturing the staging apparatus, and exposing apparatus using the staging apparatus
NIKON CORP20 citations92
US5832620ANov 10, 1998
Staging apparatus
NIKON CORP12 citations81
US5502899AApr 2, 1996
Staging apparatus
NIKON CORP17 citations81
US5561524AOct 1, 1996
Interferometric distance measuring apparatus utilizing an asymmetric/elliptic beam
NIKON CORP16 citations72
US5983513ANov 16, 1999
Staging apparatus and method, and method for manufacturing the staging apparatus, and exposing apparatus using the staging apparatus
NIKON CORP3 citations62