Inventor
KAISE KOJI
JP3 patents
Patents
3 patentsUS5666205ASep 9, 1997
Measuring method and exposure apparatus
NIKON CORP25 citations91
US6296977B1Oct 2, 2001
Method for the measurement of aberration of optical projection system
NIKON CORP55 citations90
US7667829B2Feb 23, 2010
Optical property measurement apparatus and optical property measurement method, exposure apparatus and exposure method, and device manufacturing method
NIKON CORP8 citations82