Inventor

ZIEGENHAGEN LARS

DE3 patents

⚠️ This page may combine multiple inventors who share the name “ZIEGENHAGEN LARS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US11508601B2Nov 22, 2022

Electrostatic holding apparatus with a layered composite electrode device and method for the production thereof

ASML NETHERLANDS BV2 citations64

BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO

1 patent

US11398398B2Jul 26, 2022

Electrostatic holding apparatus and method for its production

BERLINER GLAS KGAA HERBERT KUBATZ GMBH & CO2 citations64

WOLF GMBH RICHARD

1 patent

US6970620B2Nov 29, 2005

Waveguide for receiving and/or radiating electromagnetic radiation

WOLF GMBH RICHARD2 citations55