Inventor

LU JEFFERSON

TW2 patents

Patents

2 patents

US6743726B2Jun 1, 2004

Method for etching a trench through an anti-reflective coating

PROMOS TECHNOLOGIES INC10 citations68

US6998277B2Feb 14, 2006

Method of planarizing spin-on material layer and manufacturing photoresist layer

PROMOS TECHNOLOGIES INC2 citations53