Inventor

DOUBINA NATALIA V

US3 patents

Patents

3 patents

US10329683B2Jun 25, 2019

Process for optimizing cobalt electrofill using sacrificial oxidants

LAM RES CORP2 citations68

US9777386B2Oct 3, 2017

Chemistry additives and process for cobalt film electrodeposition

LAM RES CORP5 citations68

US11078591B2Aug 3, 2021

Process for optimizing cobalt electrofill using sacrificial oxidants

LAM RES CORP0 citations57