Inventor

NAKAHIRA HOSEI

JP2 patents

Patents

2 patents

US6323952B1Nov 27, 2001

Flatness measuring apparatus

NIKON CORP56 citations90

US7981309B2Jul 19, 2011

Method for detecting polishing end in CMP polishing device, CMP polishing device, and semiconductor device manufacturing method

NIKON CORP2 citations60