Inventor
MATSUKAWA EIJI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “MATSUKAWA EIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
7 patentsUS6489624B1Dec 3, 2002
Apparatus and methods for detecting thickness of a patterned layer
NIKON CORP115 citations97
US6323952B1Nov 27, 2001
Flatness measuring apparatus
NIKON CORP56 citations90
US7481945B2Jan 27, 2009
Polishing progress monitoring method and device thereof, polishing device, semiconductor device production method, and semiconductor device
NIKON CORP7 citations71
US11550206B2Jan 10, 2023
Light receiving apparatus with shock resistance
NIKON CORP2 citations70
US10237457B2Mar 19, 2019
Light receiving apparatus having body and exterior portion secured to mount
NIKON CORP2 citations70
US10305397B2May 28, 2019
Vibration actuator unit, stage apparatus, and optical apparatus
NIKON CORP1 citations62
US8344591B2Jan 1, 2013
Vibration actuator and imaging device
NIKON CORP0 citations40