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Inventor
REITMAN EDWARD A
US
2 patents
⚠️ This page may combine multiple inventors who share the name “REITMAN EDWARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
1 patent
US5654903A
Aug 5, 1997
Method and apparatus for real time monitoring of wafer attributes in a plasma etch process
LUCENT TECHNOLOGIES INC
136 citations
95
IBEX PROCESS TECHNOLOGY INC
1 patent
US6915173B2
Jul 5, 2005
Advance failure prediction
IBEX PROCESS TECHNOLOGY INC
26 citations
89