Inventor
SCHULBERG MICHELLE T
US4 patents
Patents
4 patentsUS7208389B1Apr 24, 2007
Method of porogen removal from porous low-k films using UV radiation
NOVELLUS SYSTEMS INC602 citations98
US6340628B1Jan 22, 2002
Method to deposit SiOCH films with dielectric constant below 3.0
NOVELLUS SYSTEMS INC166 citations98
US7176144B1Feb 13, 2007
Plasma detemplating and silanol capping of porous dielectric films
NOVELLUS SYSTEMS INC128 citations97
US6576345B1Jun 10, 2003
Dielectric films with low dielectric constants
NOVELLUS SYSTEMS INC110 citations97