Inventor

HARZENDORF TORSTEN

DE3 patents

⚠️ This page may combine multiple inventors who share the name “HARZENDORF TORSTEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US7282701B2Oct 16, 2007

Sensor for use in a lithographic apparatus

ASML NETHERLANDS BV12 citations81

US7453078B2Nov 18, 2008

Sensor for use in a lithographic apparatus

ASML NETHERLANDS BV8 citations71

VAN DE KERKHOF MARCUS ADRIANUS

1 patent

US8629418B2Jan 14, 2014

Lithographic apparatus and sensor therefor

VAN DE KERKHOF MARCUS ADRIANUS0 citations46