Inventor
VERSPAY JACOBUS JOHANNUS LEONA
NL7 patents
Patents
7 patentsUS7110081B2Sep 19, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV128 citations98
US7710537B2May 4, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US7423720B2Sep 9, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV21 citations92
US7397533B2Jul 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations92
US7379155B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations90
US7378025B2May 27, 2008
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations73
US7446850B2Nov 4, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations70