Inventor
SONG HYUNJAE
KR38 patents
Patents
38 patentsUS11682622B2Jun 20, 2023
Interconnect structure having nanocrystalline graphene cap layer and electronic device including the interconnect structure
SAMSUNG ELECTRONICS CO LTD5 citations86
US10522664B2Dec 31, 2019
Electronic device including a tunnel layer
SAMSUNG ELECTRONICS CO LTD7 citations84
US9935184B2Apr 3, 2018
Electronic device including a tunneling layer
SAMSUNG ELECTRONICS CO LTD6 citations84
US11626282B2Apr 11, 2023
Graphene structure and method of forming graphene structure
SAMSUNG ELECTRONICS CO LTD2 citations73
US11217531B2Jan 4, 2022
Interconnect structure having nanocrystalline graphene cap layer and electronic device including the interconnect structure
SAMSUNG ELECTRONICS CO LTD2 citations73
US11180373B2Nov 23, 2021
Nanocrystalline graphene and method of forming nanocrystalline graphene
SAMSUNG ELECTRONICS CO LTD2 citations73
US11088077B2Aug 10, 2021
Layer structure including diffusion barrier layer and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations73
US11069619B2Jul 20, 2021
Interconnect structure and electronic device employing the same
SAMSUNG ELECTRONICS CO LTD3 citations73
US10971451B2Apr 6, 2021
Interconnect structure having nanocrystalline graphene cap layer and electronic device including the interconnect structure
SAMSUNG ELECTRONICS CO LTD2 citations73
US10928723B2Feb 23, 2021
Pellicle for photomask, reticle including the same, and exposure apparatus for lithography
SAMSUNG ELECTRONICS CO LTD2 citations73
US10684560B2Jun 16, 2020
Pellicle for photomask, reticle including the same, and exposure apparatus for lithography
SAMSUNG ELECTRONICS CO LTD6 citations73
US10539868B2Jan 21, 2020
Pellicle for photomask, reticle including the same, and exposure apparatus for lithography
SAMSUNG ELECTRONICS CO LTD3 citations73
US10229881B2Mar 12, 2019
Layer structure including diffusion barrier layer and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD1 citations73
US10191367B2Jan 29, 2019
Pellicle for photomask and exposure apparatus including the pellicle
SAMSUNG ELECTRONICS CO LTD4 citations73
US10134628B2Nov 20, 2018
Multilayer structure including diffusion barrier layer and device including the multilayer structure
SAMSUNG ELECTRONICS CO LTD4 citations73
US9761532B2Sep 12, 2017
Hybrid interconnect structure and electronic device employing the same
SAMSUNG ELECTRONICS CO LTD4 citations73
US10850985B2Dec 1, 2020
Method of forming nanocrystalline graphene, and device including nanocrystalline graphene
SAMSUNG ELECTRONICS CO LTD3 citations72
US10692622B2Jun 23, 2020
Composite, carbon composite including the composite, electrode, lithium battery, electroluminescent device, biosensor, semiconductor device, and thermoelectric device including the composite and/or the carbon composite
SAMSUNG ELECTRONICS CO LTD2 citations71
US9959947B2May 1, 2018
Composite, carbon composite including the composite, electrode, lithium battery, electroluminescent device, biosensor, semiconductor device, and thermoelectric device including the composite and/or the carbon composite
SAMSUNG ELECTRONICS CO LTD2 citations71
US12506074B2Dec 23, 2025
Interconnect structure to reduce contact resistance, electronic device including the same, and method of manufacturing the interconnect structure
SAMSUNG ELECTRONICS CO LTD0 citations62
US12359911B2Jul 15, 2025
Method of calculating thickness of graphene layer and method of measuring content of silicon carbide by using XPS
SAMSUNG ELECTRONICS CO LTD0 citations62
US11906291B2Feb 20, 2024
Method of calculating thickness of graphene layer and method of measuring content of silicon carbide by using XPS
SAMSUNG ELECTRONICS CO LTD0 citations62
US11764156B2Sep 19, 2023
Layer structure including diffusion barrier layer and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations62
US11626502B2Apr 11, 2023
Interconnect structure to reduce contact resistance, electronic device including the same, and method of manufacturing the interconnect structure
SAMSUNG ELECTRONICS CO LTD1 citations62
US11094538B2Aug 17, 2021
Method of forming graphene
SAMSUNG ELECTRONICS CO LTD1 citations62
US12421598B2Sep 23, 2025
Nanocrystalline graphene and method of forming nanocrystalline graphene
SAMSUNG ELECTRONICS CO LTD0 citations61
US12477748B2Nov 18, 2025
Variable resistance memory device and electronic device including the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US11329223B2May 10, 2022
Nonvolatile memory apparatus including resistive-change material layer
SAMSUNG ELECTRONICS CO LTD0 citations60
US11158849B2Oct 26, 2021
Lithium ion battery including nano-crystalline graphene electrode
SAMSUNG ELECTRONICS CO LTD1 citations60
US10811604B2Oct 20, 2020
Nonvolatile memory apparatus including resistive-change material layer
SAMSUNG ELECTRONICS CO LTD1 citations60
US12268009B2Apr 1, 2025
Memory device including vertical stack structure, method of fabricating the same, and electronic device including memory device
SAMSUNG ELECTRONICS CO LTD0 citations59
US11572278B2Feb 7, 2023
Method of forming graphene
SAMSUNG ELECTRONICS CO LTD0 citations52
US10790230B2Sep 29, 2020
Layer structure including diffusion barrier layer and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US10727182B2Jul 28, 2020
Layer structure including diffusion barrier layer and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US10719010B2Jul 21, 2020
Pellicle for photomask and exposure apparatus including the pellicle
SAMSUNG ELECTRONICS CO LTD0 citations52
US9721943B2Aug 1, 2017
Wiring structure and electronic device including the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US12457754B2Oct 28, 2025
Nonvolatile memory device and operating method of the same
SAMSUNG ELECTRONICS CO LTD0 citations49
US12426264B2Sep 23, 2025
Semiconductor devices and data storage systems including the same
SAMSUNG ELECTRONICS CO LTD0 citations47