Inventor

TSUKAHARA KAZUTAKA

JP2 patents

Patents

2 patents

US10121666B2Nov 6, 2018

Ion implantation method and ion implantation apparatus

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD3 citations67

US10453689B2Oct 22, 2019

Ion implantation method and ion implantation apparatus

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD0 citations46