Inventor
SAKATA SOICHIRO
JP7 patents
Patents
7 patentsUS6352578B1Mar 5, 2002
Air cleaning filter, process for preparing the same, and high-level cleaner
TAKASAGO THERMAL ENGINEERING124 citations97
US6146451ANov 14, 2000
Air-cleaning filter, method of producing the same, and high-level cleaning device
TAKASAGO THERMAL ENGINEERING66 citations95
US6120584ASep 19, 2000
Air cleaning apparatus, air filter and method for manufacturing the same
TAKASAGO THERMAL ENGINEERING81 citations95
US5047892ASep 10, 1991
Apparatus for removing static electricity from charged articles existing in clean space
TAKASAGO THERMAL ENGINEERING67 citations95
US5882938AMar 16, 1999
Apparatus and method for evaluating contamination caused by organic substances deposited on substrate surface
TAKASAGO THERMAL ENGINEERING24 citations92
US5057966AOct 15, 1991
Apparatus for removing static electricity from charged articles existing in clean space
TAKASAGO THERMAL ENGINEERING46 citations92
US5798455AAug 25, 1998
Storehouse for use in storage of clean materials
TAKASAGO THERMAL ENGINEERING17 citations83