Inventor

TAIRA YUKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “TAIRA YUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US9441294B2Sep 13, 2016

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC8 citations80

US9786493B2Oct 10, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations71

KOKUSAI ELECTRIC CORP

1 patent

US12553126B2Feb 17, 2026

Method of forming film, method of manufacturing semiconductor device, film formation apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations54