Inventor · disambiguated record

Nobihiro Tokoro

Also filed as: TOKORO NOBIHIRO

1 granted patent·6 citations·filing 2005–2005

28Inventor score

Technology areasH01J

Files withVARIAN SEMICONDUCTOR EQUIPMENT1

Top patents by PatentIndex Score

1 record

0178US7462844B2Method, system, and apparatus for improving doping uniformity in high-tilt ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 9, 2008·6 cites·26 claims

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