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Inventor
SANO KAZUSHIGE
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “SANO KAZUSHIGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SANO KAZUSHIGE
1 patent
US8079506B2
Dec 20, 2011
Stud welding apparatus
SANO KAZUSHIGE
2 citations
49
TOKYO ELECTRON LTD
1 patent
US11887871B2
Jan 30, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD
0 citations
47