Inventor

KORNELSEN KEVIN

CA5 patents

⚠️ This page may combine multiple inventors who share the name “KORNELSEN KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MICRALYNE INC

2 patents

US8368983B2Feb 5, 2013

MEMS device with independent rotation in two axes of rotation

MICRALYNE INC2 citations59

US9036229B2May 19, 2015

MEMS device with independent rotation in two axes of rotation

MICRALYNE INC0 citations49

KEYWORTH BARRIE

1 patent

US8208192B2Jun 26, 2012

MEMS device with independent rotation in two axes of rotation

KEYWORTH BARRIE7 citations79

KORNELSEN KEVIN

1 patent

US10753816B2Aug 25, 2020

Calibration-less micro-fabricated vacuum gauge devices and method for measuring pressure

KORNELSEN KEVIN5 citations57

ASML NETHERLANDS BV

1 patent

US11977326B2May 7, 2024

Pellicle for EUV lithography

ASML NETHERLANDS BV0 citations56