Inventor
CASTELLANI EUGENE E
4 patents
Patents
4 patentsUS4080267AMar 21, 1978
Method for forming thick self-supporting masks
IBM70 citations93
US4315985AFeb 16, 1982
Fine-line circuit fabrication and photoresist application therefor
IBM32 citations89
US4003768AJan 18, 1977
Method for treating magnetic alloy to increase the magnetic permeability
IBM11 citations72
US4281057AJul 28, 1981
Variable pre-spin drying time control of photoresists thickness
IBM12 citations70