Inventor

SHIRAISHI YUTAKA

JP44 patents

⚠️ This page may combine multiple inventors who share the name “SHIRAISHI YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIRAISHI YUTAKA

GIGAPHOTON INC

Extreme ultraviolet light generation device and target supply device

Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator

Extreme ultraviolet light generation apparatus

Target storage device

Target supply device and extreme ultraviolet light generating device

Target material refinement device and target supply apparatus

EUV light generation apparatus, electronic device manufacturing method, and inspection method

Target supply device, extreme ultraviolet light generating apparatus, and electronic device manufacturing method

Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

Extreme ultraviolet light generation apparatus and electronic device manufacturing method

Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

Target supply device, target supply method, and electronic device manufacturing method

Target supply device, target supply method, and electronic device manufacturing method

Chamber device, target generation method, and extreme ultraviolet light generation system

Target substance replenishment device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

Target supply device and EUV light generation apparatus

Target supply device

Target supply device, processing device and processing method therefor

Target supply device, processing device and processing method thefefor

Extreme ultraviolet light generation apparatus

Target generation device and extreme ultraviolet light generation device

Filter and target supply apparatus

KOMATSU DENSHI KINZOKU KK

Apparatus for detecting the diameter of a single-crystal silicon

Apparatus and method for producing single crystal

Method for producing single crystal

Method for fabricating semiconductor single crystal

Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingot

SUPER SILICON CRYSTAL RES INST

Single crystal material auxiliary melting apparatus and single crystal material melting method

Single crystal pull-up apparatus and single crystal pull-up method

Semiconductor single crystal manufacturing apparatus

Single crystal pulling apparatus, single crystal support mechanism, and single crystal pulling method

SUMCO TECHXIV CORP

Single crystal silicon producing method, single crystal silicon wafer producing method, seed crystal for producing single crystal silicon, single crystal silicon ingot, and single crystal silicon wafer

Silicon single crystal producing method, annealed wafer, and method of producing annealed wafer

Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingot

MITSUBISHI ENG PLASTICS CORP

Tray for semiconductor integrated circuit devices

Optimization of overmolding method for three-dimensional hollow molded article

JAPAN RES DEV CORP

Single crystal pulling apparatus having slidable shield plate to control area of opening around single crystal

Control of oxygen concentration in single crystal pulled up from melt containing Group-V element

BANDOH KENICHI

Control system and method for controlled object in time variant system with dead time, such as single crystal production device by czochralski method

KUROKI HIDETOSHI

Method for producing silicon wafer

NAGAI SHINJI

Chamber apparatus

MONDEN TOSHIKI

Polycarbonate resin composition and molded article

IIDA TETSUHIRO

Single crystal semiconductor manufacturing apparatus and manufacturing method

KUROKAWA HARUHIKO

Aromatic polycarbonate resin composition, method for producing the resin composition, and molded article of the same