Inventor
PITTAL SHAKIL A
US4 patents
Patents
4 patentsUS5666201ASep 9, 1997
Multiple order dispersive optics system and method of use
J A WOOLLAM CO INC95 citations96
US5521706AMay 28, 1996
System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
J A WOOLLAM CO INC107 citations96
US5504582AApr 2, 1996
System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
J A WOOLLAM CO INC83 citations94
US5805285ASep 8, 1998
Multiple order dispersive optics system and method of use
J A WOOLLAM CO INC43 citations92