Inventor
GREEN STEVEN E
US38 patents
⚠️ This page may combine multiple inventors who share the name “GREEN STEVEN E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
J A WOOLLAM CO INC
33 patentsUS7907280B2Mar 15, 2011
Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation
J A WOOLLAM CO INC94 citations98
US7460230B2Dec 2, 2008
Deviation angle self compensating substantially achromatic retarder
J A WOOLLAM CO INC108 citations97
US7450231B2Nov 11, 2008
Deviation angle self compensating substantially achromatic retarder
J A WOOLLAM CO INC105 citations97
US5963325AOct 5, 1999
Dual vertically oriented triangular shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC47 citations96
US5956145ASep 21, 1999
System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems
J A WOOLLAM CO INC85 citations96
US5757494AMay 26, 1998
System and method for improving data acquisition capability in spectroscopic ellipsometers
J A WOOLLAM CO INC77 citations96
US5666201ASep 9, 1997
Multiple order dispersive optics system and method of use
J A WOOLLAM CO INC95 citations96
US5521706AMay 28, 1996
System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
J A WOOLLAM CO INC107 citations96
US5504582AApr 2, 1996
System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system
J A WOOLLAM CO INC83 citations94
US6795184B1Sep 21, 2004
Odd bounce image rotation system in ellipsometer systems
J A WOOLLAM CO INC24 citations93
US6118537ASep 12, 2000
Multiple tipped berek plate optical retarder elements for use in spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC39 citations93
US6100981AAug 8, 2000
Dual horizontally oriented triangle shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC38 citations93
US6084674AJul 4, 2000
Parallelogram shaped optical retarder element for use in spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC36 citations93
US5946098AAug 31, 1999
Optical elements for use in spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC41 citations93
US6982792B1Jan 3, 2006
Spectrophotometer, ellipsometer, polarimeter and the like systems
J A WOOLLAM CO INC49 citations92
US5805285ASep 8, 1998
Multiple order dispersive optics system and method of use
J A WOOLLAM CO INC43 citations92
US6535286B1Mar 18, 2003
Positionable multiple detector system for spectrophotomer, ellipsometer, polarimeter and systems, and methodology of use
J A WOOLLAM CO INC24 citations86
US7336361B1Feb 26, 2008
Spectroscopic ellipsometer and polarimeter systems
J A WOOLLAM CO INC15 citations84
US6831740B2Dec 14, 2004
Methodology for improving precision of data acquired by spectrophotometer systems
J A WOOLLAM CO INC13 citations84
US7280194B1Oct 9, 2007
Accurate determination of refractive indices of solid, fluid and liquid materials
J A WOOLLAM CO INC12 citations83
US7274450B1Sep 25, 2007
Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems
J A WOOLLAM CO INC19 citations83
US7304737B1Dec 4, 2007
Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence
J A WOOLLAM CO INC8 citations74
US7245376B2Jul 17, 2007
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter
J A WOOLLAM CO INC9 citations74
US7193710B1Mar 20, 2007
Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses
J A WOOLLAM CO INC9 citations74
US6483586B1Nov 19, 2002
Beam splitting analyzer means in rotating compensator ellipsometer
J A WOOLLAM CO INC8 citations74
US7136162B1Nov 14, 2006
Alignment of ellipsometer beam to sample surface
J A WOOLLAM CO INC10 citations73
US7623237B1Nov 24, 2009
Sample investigating system
J A WOOLLAM CO INC5 citations63
US7215424B1May 8, 2007
Broadband ellipsometer or polarimeter system including at least one multiple element lens
J A WOOLLAM CO INC6 citations63
US7327456B1Feb 5, 2008
Spectrophotometer, ellipsometer, polarimeter and the like systems
J A WOOLLAM CO INC7 citations62
US7151605B1Dec 19, 2006
Methodology for providing good data at all wavelengths over a spectroscopic range
J A WOOLLAM CO INC5 citations62
US7301631B1Nov 27, 2007
Control of uncertain angle of incidence of beam from Arc lamp
J A WOOLLAM CO INC0 citations52
US11821833B2Nov 21, 2023
Fast and accurate Mueller matrix infrared ellipsometer
J A WOOLLAM CO INC0 citations51
US11740176B2Aug 29, 2023
Fast and accurate mueller matrix infrared spectroscopic ellipsometer
J A WOOLLAM CO INC0 citations51