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Inventor
FU XIAO-AN
US
3 patents
⚠️ This page may combine multiple inventors who share the name “FU XIAO-AN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FLX MICRO INC
1 patent
US7261919B2
Aug 28, 2007
Silicon carbide and other films and method of deposition
FLX MICRO INC
60 citations
92
UNIV CASE WESTERN RESERVE
1 patent
USRE42887E
Nov 1, 2011
Silicon carbide and other films and method of deposition
UNIV CASE WESTERN RESERVE
1 citations
59
MEHREGANY MEHRAN
1 patent
US8153280B2
Apr 10, 2012
Composition comprising silicon carbide
MEHREGANY MEHRAN
0 citations
47