Inventor
TOBIN PHILIP J
US52 patents
⚠️ This page may combine multiple inventors who share the name “TOBIN PHILIP J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
41 patentsUS6063698AMay 16, 2000
Method for manufacturing a high dielectric constant gate oxide for use in semiconductor integrated circuits
MOTOROLA INC231 citations99
US6362071B1Mar 26, 2002
Method for forming a semiconductor device with an opening in a dielectric layer
MOTOROLA INC149 citations98
US6027961AFeb 22, 2000
CMOS semiconductor devices and method of formation
MOTOROLA INC358 citations98
US5972804AOct 26, 1999
Process for forming a semiconductor device
MOTOROLA INC181 citations98
US5712208AJan 27, 1998
Methods of formation of semiconductor composite gate dielectric having multiple incorporated atomic dopants
MOTOROLA INC95 citations98
US5552332ASep 3, 1996
Process for fabricating a MOSFET device having reduced reverse short channel effects
MOTOROLA INC160 citations98
US5464792ANov 7, 1995
Process to incorporate nitrogen at an interface of a dielectric layer in a semiconductor device
MOTOROLA INC122 citations98
US5407870AApr 18, 1995
Process for fabricating a semiconductor device having a high reliability dielectric material
MOTOROLA INC113 citations98
US6432779B1Aug 13, 2002
Selective removal of a metal oxide dielectric
MOTOROLA INC139 citations97
US6020024AFeb 1, 2000
Method for forming high dielectric constant metal oxides
MOTOROLA INC461 citations97
US5885870AMar 23, 1999
Method for forming a semiconductor device having a nitrided oxide dielectric layer
MOTOROLA INC120 citations97
US4987102AJan 22, 1991
Process for forming high purity thin films
MOTOROLA INC432 citations97
US4570328AFeb 18, 1986
Method of producing titanium nitride MOS device gate electrode
MOTOROLA INC676 citations97
US6297173B1Oct 2, 2001
Process for forming a semiconductor device
MOTOROLA INC52 citations96
US6136682AOct 24, 2000
Method for forming a conductive structure having a composite or amorphous barrier layer
MOTOROLA INC73 citations96
US5726087AMar 10, 1998
Method of formation of semiconductor gate dielectric
MOTOROLA INC89 citations96
US5571734ANov 5, 1996
Method for forming a fluorinated nitrogen containing dielectric
MOTOROLA INC71 citations96
US5510278AApr 23, 1996
Method for forming a thin film transistor
MOTOROLA INC67 citations96
US4548654AOct 22, 1985
Surface denuding of silicon wafer
MOTOROLA INC109 citations96
US4897364AJan 30, 1990
Method for locos isolation using a framed oxidation mask and a polysilicon buffer layer
MOTOROLA INC57 citations95
US4822753AApr 18, 1989
Method for making a w/tin contact
MOTOROLA INC100 citations95
US6717226B2Apr 6, 2004
Transistor with layered high-K gate dielectric and method therefor
MOTOROLA INC52 citations94
US4605947AAug 12, 1986
Titanium nitride MOS device gate electrode and method of producing
MOTOROLA INC70 citations94
US6383873B1May 7, 2002
Process for forming a structure
MOTOROLA INC66 citations93
US5580815ADec 3, 1996
Process for forming field isolation and a structure over a semiconductor substrate
MOTOROLA INC74 citations93
US5371035ADec 6, 1994
Method for forming electrical isolation in an integrated circuit device
MOTOROLA INC39 citations93
US5300187AApr 5, 1994
Method of removing contaminants
MOTOROLA INC66 citations93
US4740483AApr 26, 1988
Selective LPCVD tungsten deposition by nitridation of a dielectric
MOTOROLA INC28 citations93
US6423632B1Jul 23, 2002
Semiconductor device and a process for forming the same
MOTOROLA INC34 citations92
US6376349B1Apr 23, 2002
Process for forming a semiconductor device and a conductive structure
MOTOROLA INC29 citations92
US6255204B1Jul 3, 2001
Method for forming a semiconductor device
MOTOROLA INC31 citations92
US5830802ANov 3, 1998
Process for reducing halogen concentration in a material layer during semiconductor device fabrication
MOTOROLA INC32 citations92
US5543635AAug 6, 1996
Thin film transistor and method of formation
MOTOROLA INC20 citations92
US4914046AApr 3, 1990
Polycrystalline silicon device electrode and method
MOTOROLA INC62 citations92
US5707889AJan 13, 1998
Process for forming field isolation
MOTOROLA INC21 citations91
US6084279AJul 4, 2000
Semiconductor device having a metal containing layer overlying a gate dielectric
MOTOROLA INC31 citations90
US4927780AMay 22, 1990
Encapsulation method for localized oxidation of silicon
MOTOROLA INC38 citations88
US6818493B2Nov 16, 2004
Selective metal oxide removal performed in a reaction chamber in the absence of RF activation
MOTOROLA INC7 citations74
US5208189AMay 4, 1993
Process for plugging defects in a dielectric layer of a semiconductor device
MOTOROLA INC8 citations74
US4819040AApr 4, 1989
Epitaxial CMOS by oxygen implantation
MOTOROLA INC9 citations74
US5352615AOct 4, 1994
Denuding a semiconductor substrate
MOTOROLA INC11 citations73
FREESCALE SEMICONDUCTOR INC
9 patentsUS6894353B2May 17, 2005
Capped dual metal gate transistors for CMOS process and method for making the same
FREESCALE SEMICONDUCTOR INC70 citations98
US7091568B2Aug 15, 2006
Electronic device including dielectric layer, and a process for forming the electronic device
FREESCALE SEMICONDUCTOR INC59 citations95
US7015153B1Mar 21, 2006
Method for forming a layer using a purging gas in a semiconductor process
FREESCALE SEMICONDUCTOR INC56 citations95
US7029980B2Apr 18, 2006
Method of manufacturing SOI template layer
FREESCALE SEMICONDUCTOR INC25 citations92
US6972224B2Dec 6, 2005
Method for fabricating dual-metal gate device
FREESCALE SEMICONDUCTOR INC16 citations84
US7655550B2Feb 2, 2010
Method of making metal gate transistors
FREESCALE SEMICONDUCTOR INC14 citations83
US7297588B2Nov 20, 2007
Electronic device comprising a gate electrode including a metal-containing layer having one or more impurities and a process for forming the same
FREESCALE SEMICONDUCTOR INC7 citations73
US7868389B2Jan 11, 2011
Electronic device comprising a gate electrode including a metal-containing layer having one or more impurities
FREESCALE SEMICONDUCTOR INC2 citations62
US7432164B2Oct 7, 2008
Semiconductor device comprising a transistor having a counter-doped channel region and method for forming the same
FREESCALE SEMICONDUCTOR INC6 citations62
Showing the top 50 of 52 patents by PatentIndex Score.