Inventor
TAKI TOMOKAZU
JP5 patents
Patents
5 patentsUS11372342B2Jun 28, 2022
Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method
CANON KK3 citations69
US11829083B2Nov 28, 2023
Detection apparatus, lithography apparatus, article manufacturing method, and detection method
CANON KK0 citations60
US12023850B2Jul 2, 2024
Position detection apparatus, imprint apparatus, and article manufacturing method
CANON KK0 citations47
US11934098B2Mar 19, 2024
Detection apparatus, lithography apparatus, and article manufacturing method
CANON KK0 citations47
US10001702B2Jun 19, 2018
Imprinting apparatus, device fabrication method, and imprinting method
CANON KK1 citations39