Inventor
FUJIMOTO MASAYOSHI
JP8 patents
Patents
8 patentsUS9946173B2Apr 17, 2018
Imprinting apparatus, imprinting method, and article manufacturing method
CANON KK5 citations71
US10451965B2Oct 22, 2019
Imprint system and method of manufacturing article
CANON KK1 citations61
US10315344B2Jun 11, 2019
Imprint apparatus, imprint method, and method of manufacturing article
CANON KK1 citations61
US12533842B2Jan 27, 2026
Imprint apparatus
CANON KK0 citations47
US11565444B2Jan 31, 2023
Imprint apparatus, imprint method, and article manufacturing method
CANON KK0 citations47
US11422459B2Aug 23, 2022
Data generation method, imprint method, imprint apparatus, and method of manufacturing article
CANON KK0 citations47
US10661486B2May 26, 2020
Imprint system and method of manufacturing article
CANON KK0 citations40
US10481492B2Nov 19, 2019
Imprint apparatus and method of manufacturing article
CANON KK0 citations39