Inventor
MURAMOTO SUSUMU
JP4 patents
Patents
4 patentsUS4564997AJan 21, 1986
Semiconductor device and manufacturing process thereof
NIPPON TELEGRAPH & TELEPHONE83 citations94
US4448800AMay 15, 1984
Method for the manufacture of semiconductor device using refractory metal in a lift-off step
NIPPON TELEGRAPH & TELEPHONE41 citations91
US4566940AJan 28, 1986
Manufacturing process for semiconductor integrated circuits
NIPPON TELEGRAPH & TELEPHONE24 citations80
US4543592ASep 24, 1985
Semiconductor integrated circuits and manufacturing process thereof
NIPPON TELEGRAPH & TELEPHONE16 citations80