Inventor
PARMANTIE WALTER D
US4 patents
Patents
4 patentsUS6048789AApr 11, 2000
IC interconnect formation with chemical-mechanical polishing and silica etching with solution of nitric and hydrofluoric acids
VLSI TECHNOLOGY INC72 citations93
US5793094AAug 11, 1998
Methods for fabricating anti-fuse structures
VLSI TECHNOLOGY INC22 citations91
US5395773AMar 7, 1995
MOSFET with gate-penetrating halo implant
VLSI TECHNOLOGY INC56 citations91
US5493132AFeb 20, 1996
Integrated circuit contact barrier formation with ion implant
VLSI TECHNOLOGY INC10 citations71