Inventor
KAI SHAO
CN6 patents
Patents
6 patentsUS6730573B1May 4, 2004
MIM and metal resistor formation at CU beol using only one extra mask
CHARTERED SEMICONDUCTOR MFG96 citations95
US6576526B2Jun 10, 2003
Darc layer for MIM process integration
CHARTERED SEMICONDUCTOR MFG93 citations94
US6746914B2Jun 8, 2004
Metal sandwich structure for MIM capacitor onto dual damascene
CHARTERED SEMICONDUCTOR MFG56 citations92
US6218234B1Apr 17, 2001
Dual gate and double poly capacitor analog process integration
CHARTERED SEMICONDUCTOR MFG32 citations91
US6608362B1Aug 19, 2003
Method and device for reducing capacitive and magnetic effects from a substrate by using a schottky diode under passive components
CHARTERED SEMICONDUCTOR MFG8 citations72
US6780727B2Aug 24, 2004
Method for forming a MIM (metal-insulator-metal) capacitor
CHARTERED SEMICONDUCTOR MFG8 citations66