Inventor
OKUYAMA RYOSUKE
JP9 patents
Patents
9 patentsUS11195716B2Dec 7, 2021
Method of producing semiconductor epitaxial wafer and method of producing semiconductor device
SUMCO CORP2 citations69
US10224203B2Mar 5, 2019
Method of producing semiconductor epitaxial wafer and method of producing solid-state image sensor
SUMCO CORP1 citations60
US11935745B2Mar 19, 2024
Semiconductor epitaxial wafer and method of producing semiconductor epitaxial wafer, and method of producing solid-state imaging device
SUMCO CORP0 citations59
US11640907B2May 2, 2023
Semiconductor epitaxial wafer and method of producing semiconductor epitaxial wafer, and method of producing solid-state imaging device
SUMCO CORP0 citations59
US11211423B2Dec 28, 2021
Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensor
SUMCO CORP0 citations59
US11107687B2Aug 31, 2021
Semiconductor epitaxial wafer and method of producing semiconductor epitaxial wafer, and method of producing solid-state imaging device
SUMCO CORP0 citations59
US10153323B2Dec 11, 2018
Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensor
SUMCO CORP1 citations59
US10861709B2Dec 8, 2020
Method of evaluating impurity gettering capability of epitaxial silicon wafer and epitaxial silicon wafer
SUMCO CORP0 citations51
US10629648B2Apr 21, 2020
Method of producing semiconductor epitaxial wafer, semiconductor epitaxial wafer, and method of producing solid-state image sensor
SUMCO CORP0 citations48