Inventor
ZHENG JIAOZENG
CN3 patents
Patents
3 patentsUS10276417B2Apr 30, 2019
Pre-alignment device and method for wafer
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD4 citations66
US10782614B2Sep 22, 2020
Edge exposure device and method
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations27
US10416578B2Sep 17, 2019
Substrate pre-alignment method
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD0 citations26