Inventor
REISING MICHAEL
DE11 patents
⚠️ This page may combine multiple inventors who share the name “REISING MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SINGULUS TECH AG
3 patentsUS11597998B2Mar 7, 2023
Vacuum lock and method for transferring a substrate carrier
SINGULUS TECH AG1 citations53
US11062929B2Jul 13, 2021
Device and method for treating substrates using a support roller having a porous material
SINGULUS TECH AG1 citations47
US12188122B2Jan 7, 2025
Process and device for providing vapor
SINGULUS TECH AG0 citations41