Inventor
FURUKAWA SHINJI
JP34 patents
⚠️ This page may combine multiple inventors who share the name “FURUKAWA SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10468237B2Nov 5, 2019
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations73
US10049860B2Aug 14, 2018
Substrate processing apparatus
TOKYO ELECTRON LTD4 citations73
US9790590B2Oct 17, 2017
Vacuum-processing apparatus, vacuum-processing method, and storage medium
TOKYO ELECTRON LTD6 citations71
US9567667B2Feb 14, 2017
Dual-target sputter deposition with controlled phase difference between target powers
TOKYO ELECTRON LTD2 citations71
US9551060B2Jan 24, 2017
Film forming apparatus and film forming method
TOKYO ELECTRON LTD6 citations70
US11469106B2Oct 11, 2022
Hard mask and hard mask forming method
TOKYO ELECTRON LTD0 citations62
US10189230B2Jan 29, 2019
Method for forming copper film
TOKYO ELECTRON LTD1 citations62
US10910215B2Feb 2, 2021
Method of forming later insulating films for MTJ
TOKYO ELECTRON LTD0 citations52
US10068798B2Sep 4, 2018
Method and processing apparatus for performing pre-treatment to form copper wiring in recess formed in substrate
TOKYO ELECTRON LTD1 citations52
US9362167B2Jun 7, 2016
Method of supplying cobalt to recess
TOKYO ELECTRON LTD1 citations52
US11410837B2Aug 9, 2022
Film-forming device
TOKYO ELECTRON LTD0 citations50
UNITIKA LTD
8 patentsUS5181020AJan 19, 1993
Thin-film magnetic material and process of production thereof
UNITIKA LTD53 citations93
US5605768AFeb 25, 1997
Magnetic marker and manufacturing method therefor
UNITIKA LTD22 citations90
US6154028ANov 28, 2000
Miniature magnetic sensor device using an inductor device
UNITIKA LTD27 citations88
US4657604AApr 14, 1987
Fine amorphous metal wires
UNITIKA LTD10 citations71
US5989691ANov 23, 1999
Magnetic element
UNITIKA LTD4 citations61
US5932310AAug 3, 1999
Magnetic element and process for producing the same
UNITIKA LTD4 citations61
US4657605AApr 14, 1987
Fine amorphous metal wires
UNITIKA LTD3 citations60
US5912075AJun 15, 1999
Magnetic marker and process for manufacturing a roll having a plurality of magnetic markers arranged transversely thereon
UNITIKA LTD0 citations49
ANELVA CORP
5 patentsUS6572934B2Jun 3, 2003
Method for manufacturing a magnetic recording disk
ANELVA CORP20 citations92
US6740209B2May 25, 2004
Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media
ANELVA CORP23 citations91
US7935187B2May 3, 2011
Film forming apparatus
ANELVA CORP4 citations73
US6872285B2Mar 29, 2005
System for depositing a film
ANELVA CORP4 citations62
US8377210B2Feb 19, 2013
Film forming apparatus
ANELVA CORP0 citations51
CANON ANELVA CORP
4 patentsUS7625450B2Dec 1, 2009
Film forming apparatus
CANON ANELVA CORP9 citations83
US7824497B2Nov 2, 2010
Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
CANON ANELVA CORP6 citations73
US7731825B2Jun 8, 2010
Manufacturing apparatus of magnetoresistance elements
CANON ANELVA CORP2 citations62
US8715417B2May 6, 2014
Film forming apparatus
CANON ANELVA CORP0 citations51
TSUNEKAWA KOJI
2 patentsUS8837924B2Sep 16, 2014
Vacuum heating/cooling apparatus and manufacturing method of magnetoresistance element
TSUNEKAWA KOJI14 citations83
US8932438B2Jan 13, 2015
Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage medium
TSUNEKAWA KOJI6 citations71