Inventor
GROVES TIMOTHY R
US12 patents
⚠️ This page may combine multiple inventors who share the name “GROVES TIMOTHY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS5981962ANov 9, 1999
Distributed direct write lithography system using multiple variable shaped electron beams
IBM76 citations95
US6175122B1Jan 16, 2001
Method for writing a pattern using multiple variable shaped electron beams
IBM57 citations92
US5962859AOct 5, 1999
Multiple variable shaped electron beam system with lithographic structure
IBM28 citations92
US5585629ADec 17, 1996
Electron beam nano-metrology system
IBM36 citations92
US4859856AAug 22, 1989
Telecentric sub-field deflection with vail
IBM21 citations81
US6822248B2Nov 23, 2004
Spatial phase locking with shaped electron beam lithography
IBM13 citations80
US5756234AMay 26, 1998
High accuracy fabrication of X-ray masks with optical and E-beam lithography
IBM8 citations73
US5916716AJun 29, 1999
Emulation methodology for critical dimension control in E-Beam lithography
IBM16 citations71
US4737644AApr 12, 1988
Conductive coated semiconductor electrostatic deflection plates
IBM7 citations69
US6369396B1Apr 9, 2002
Calibration target for electron beams
IBM2 citations62