Inventor
BIELLAK STEVE
US3 patents
Patents
3 patentsUS6956644B2Oct 18, 2005
Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
KLA TENCOR TECH CORP34 citations91
US7218392B2May 15, 2007
Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
KLA TENCOR TECH CORP11 citations82
US6577389B2Jun 10, 2003
System and methods for inspection of transparent mask substrates
KLA TENCOR TECH CORP5 citations61