Inventor

HINTERSTEINER JASON DOUGLAS

US6 patents

⚠️ This page may combine multiple inventors who share the name “HINTERSTEINER JASON DOUGLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US6778257B2Aug 17, 2004

Imaging apparatus

ASML NETHERLANDS BV953 citations97

US7023525B2Apr 4, 2006

Imaging apparatus

ASML NETHERLANDS BV13 citations82

ASML HOLDING NV

2 patents

US8009269B2Aug 30, 2011

Optimal rasterization for maskless lithography

ASML HOLDING NV2 citations56

US7403266B2Jul 22, 2008

Maskless lithography systems and methods utilizing spatial light modulator arrays

ASML HOLDING NV1 citations48

TROOST KARS ZEGER

1 patent

US8259285B2Sep 4, 2012

Lithographic system, device manufacturing method, setpoint data optimization method, and apparatus for producing optimized setpoint data

TROOST KARS ZEGER5 citations57

HINTERSTEINER JASON DOUGLAS

1 patent

US8064122B2Nov 22, 2011

Apertured window for enabling flexible illumination overfill of patterning devices

HINTERSTEINER JASON DOUGLAS1 citations43