Inventor
TRINH SON N
US4 patents
Patents
4 patentsUS6461435B1Oct 8, 2002
Showerhead with reduced contact area
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Resonant chamber applicator for remote plasma source
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Plating uniformity control by contact ring shaping
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US7067045B2Jun 27, 2006
Method and apparatus for sealing electrical contacts during an electrochemical deposition process
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