Inventor
SCOTT BRANDON SHANE
US2 patents
Patents
2 patentsUS7029508B2Apr 18, 2006
Catalyst attached to solid and used to promote free radical formation in CMP formulations
DUPONT AIR PROD NANOMATERIALS56 citations93
US7427305B2Sep 23, 2008
Free radical-forming activator attached to solid and used to enhance CMP formulations
DUPONT AIR PROD NANOMATERIALS16 citations89